Low Substrate Temperature and Electrochromic Property of Sputtered NiOx Films

Jinwei Zhang,Xungang Diao,Huaiyi Wang,Tianmin Wang,Zhe Wu,Yuanjie Shu
DOI: https://doi.org/10.13922/j.cnki.cjovst.2008.03.005
2008-01-01
Abstract:NiOx films were grown by magnetron sputtering on glass substrates covered by indium tin oxide (ITO) films, and held at different low temperatures. The films were characterized with X-ray diffraction (XRD), scanning electron microacopy (SEM), Raman spectroscopy, X-ray photoelectron spectroscopy (XPS) and cyclic voltammograms. The results show that low substrate temperature significantly improves the electro-chromic property of the films. There exist more Ni2+ ions, Ni2+ vacancies and pores in the film, grown at the low temperature, than those at room temperature. The Ni2+ ions participate in the electn-chromic reaction and the pores promote injection and ejection of H+ ion. We suggest that insertion and extraction of H+ ion account for coloration and bleaching of the NiOx films in KOH solution. Possible mechanism is: Ni(OH)2 ↔ NiOOH+H++e-. The coloration efficiency (38.2 cm2/C) of the NiOx films deposited at 173 K is better than that at room temperature (16.3 cm2/C).
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