STRUCTURE ANALYSIS OF Ti-DOPED DLC COATINGS DEPOSITED BY UNBALANCED MAGNETRON SPUTTERING

Nie Chaoyin,Zhang Biyun,Xie Hongme
DOI: https://doi.org/10.3321/j.issn:0412-1961.2007.11.016
IF: 1.797
2007-01-01
ACTA METALLURGICA SINICA
Abstract:Using the unbalanced magnetron sputtering method, hydrogen-free titanium-doped diamond-like carbon (Ti-DLC) film and hydrogen-free pure diamond-like carbon (DLC) film were deposited on carburized SCM415 steel substrate. As preparing Ti-DLC films, the sputtering power of titanium target was varied so that the Ti concentration in the films could be controlled from 1.9% to 34% (atomic fraction). The structure, microhardness and adhesion strength were investigated by Raman spectrum, XPS, XRD, nano indenter and scratch tester. The results show that all the Ti-DLC coatings have a similar Raman spectrum with pure DLC, but dropping titanium will cause a transform from Sp(3) to Sp(2) configuration. The results also show that the hardness of Ti-DLC films decreases, and the adhesion strength increases drastically, when Ti concentration is above 3%, there is no obvious change in adhesion strength, but a slight increase in hardness which is due to the nanocomposite structure of TiC nanocrystals dispersing in the amorphous DLC films.
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