A Method to Measure the Fatigue Property of a Micro-Cantilever Beam

YU Cun-jiang,TANG Jie-ying,HUANG Qing-an
DOI: https://doi.org/10.3969/j.issn.1004-1699.2007.09.044
2007-01-01
Abstract:Many results on the fatigue properties of a MEMS structure have been reported, among which the typical approaches were based on and developed from the principles of detecting the flaws and their propagations, such as using a fan shape comb-drivers to yield cyclic compression and tension, and then, to observe the flaw propagation in a Si beam structure. This paper aims at describing the fatigue phenomenon by using the gradually variable parameters i.e., mean E method, and then, proposing a test structure, through measuring capacitance to describe the fatigue property. This capacitance has a close relation to the displacement induced by the force applied on. The mean Young's modulus E is calculated according to the measured capacitance to reflect the fatigue property of the simple MEMS structure. At the end of this article, this method is verified by ANSYS.
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