An Algorithm Based on Mixed Boundary Element Integral Formulations for Extracting Frequency-Dependent Impedances of 3D VLSI Interconnects

Fang Gong,Wenjian Yu,Changhao Yan,Zeyi Wang
2007-01-01
Abstract:Based on the mixed boundary element method, this paper proposes several techniques for 3D impedance extraction, including an efficient organization and row-column adjustment of the sparse coefficient matrix, and a pre-conditioned iterative equation solver. A fast impedance extractor is formed with these techniques. The proposed method has faster speed than the newly-developed FastImp by MIT, while preserving high accuracy. Numerical experiments on two typical interconnect structures verify the efficiency of this method.
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