Reaearch Development of Quartz Micromachined Gyroscopes
Guan Ran,Zhang Weiping,Chen Wenyuan,Zhang Gong,Cheng Yuxiang
DOI: https://doi.org/10.3969/j.issn.1671-4776.2012.03.007
2012-01-01
Abstract:Firstly,the working principle of the quartz micromachined gyroscope is introduced,which is based on the piezoelectric effect and the Coriolis acceleration,the development history of the quartz micromachined gyroscope is reviewed,and the development present situation of the quartz micromachined gyroscope is introduced both domestically and abroad.Then,the quartz micromachined gyroscope is classified into several types according to its different structures,and the specific fabrication process,performance parameter and application fields of the quartz micromachined gyroscope for the different structures are reviewed.Finally,the parameters of the quartz micromachined gyroscope for the different kinds of structures are summarized and compared,including the size,fabrication process,detection axis and accuracy,and on that basis,the development trends of the quartz micromachined gyroscope are analyzed,and the problems that limit the development of quartz micromachined gyroscope are pointed out,including the uneven crystal edges of the quartz sidewall caused by the fabrication process,the difficulties of electrode fabrication on the quartz sidewall and the limitation of the multi-axis application for the quartz micromachined gyroscope.