Micro-rotor Fabricated and Rotated by Laser

ZHU An-ding,LIU Yu-xiang,GUO Rui,XIAO Shi-zhou,HUANG Wen-hao
DOI: https://doi.org/10.3969/j.issn.1003-501x.2006.01.003
2006-01-01
Abstract:Driving micro-devices with optical force created by tight focused single laser beam provides anew driving method to MEMS field. This optical driving method is characteristic of no mechanicalcontact and wire connection. With a homemade femtosecond laser microfabrication system,swastika-shaped micro-rotors with the diameter of 6μm are fabricated by two-photon polymerizationwith the help of a novel methyl acrylate UV resin. The rotors are trapped and rotated by laser tweezers.The maximum rotation speed of over 200rpm is obtained at 50mW laser power. Optical rotation ofmicro-rotor facilitates the implementation of micro-mechanical rotor.
What problem does this paper attempt to address?