A PCA based method for diagnosing process failures

Liren Yan
2006-01-01
Abstract:In an IC process line, after a process is finished, the PCM (Process Control Module or Monitor) data are tested and the data are surveyed so that the status of the process quality is known. In the case of a process failure occurring, the reason for the failure must be detected, and pertinent actions must be taken to correct the process. In this paper, we describe a novel way of diagnosing process failures. At first, the tested PCM parameters, which are correlated to each other, are PCA (Principal Component Analysis) analyzed and transformed to a new set of independent parameters. In a second step, the most important eigenvectors from PCA calculation are identified, and the causes for the process failures can be extracted.
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