Inexpensive Fabrication and Secondary Electron Emission Property of MgO Films

Mingzhi Yin,Xi Yao
DOI: https://doi.org/10.3969/j.issn.1000-2758.2006.04.008
2006-01-01
Xibei Gongye Daxue Xuebao/Journal of Northwestern Polytechnical University
Abstract:The major aim is to search for an inexpensive but effective way of fabricating MgO films.The minor aim is the determination of secondary electron emission property of such films needed for ensuring the quality of PDP(plasma display panel) to be made in China.(100) oriented MgO films on Si(111)substrate were successfully prepared by using sol-gel process of magnesium inorganic salt.(Mg(NO_3)_2·6H_2O) glacial acetic acid solution was changed into Mg(CH_3COO)_2 by refluxing in anhydrous solvent,and acetylacetone(AcAc) was partially bidentated with metallic ion of the(Mg(CH_3COO)_2) to form Mg(CH_3COO)_(2x)(AcAc)_x,which was hydrolyzed and clustered;Poly(vinylalcohol)(PVA),complexing or adhering with hydroxylated-Mg-clusters,made the MgO sol precursor polymeric and filmy easily.The gel MgO films were crystallized after being annealed above 750℃/60 min and no other preferred orientation than(100) was detected.The MgO(100) feature can be explained by the nucleation mechanism as internal nucleation.Fig.5 in the full paper shows the two curves of variation of γ coefficient of secondary electron emission property with E/p,corresponding respectively to annealing temperatures of 750℃ and 850℃.The properties are quite close to the curves determined for MgO films fabricated by pulsed laser deposition or rf-magnetron sputtering~().
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