Studies on MEMS Neural Micro Probe

Zheng-xi CHENG,Wei-ning HUANG,Jia ZHOU,Yi-ping HUANG,Min-hang BAO
DOI: https://doi.org/10.3969/j.issn.1004-1699.2006.05.019
2006-01-01
Abstract:A micromachined neural probe with multiple electrodes is presented. The micro probe is characterized using impedance analyzer. The AC impedance of single electrode in the frequency range from 100 to 1 000 Hz is measured in physiological saline solution. At the working frequency of 1 kHz, its AC resistance and AC capacitive reactance reaches 100 kΩ and 10 kΩ, respectively, with time drift less than 1%. As a preliminary application, the AC impedance between two electrodes is measured in NaCl solution with different concentrations. The results show that the probe is applicable for the future biological experiments.
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