Effect of Plasma Density on Ion Energy Flux Colliding on the Material Surface

Zhigang Li,Yucheng Ding
DOI: https://doi.org/10.3321/j.issn:1000-6753.2006.07.003
2006-01-01
Abstract:The relationship between the ion energy flux colliding on the material surface and the plasma density is investigated. Based on the radio frequency sheath model, the equations for ion velocity, density, and energy flux colliding on the material surface are derived. The effect of plasma density on the ion energy flux is analyzed. The experimental data are in agreement with the theoretical analysis and verify the analysis. Plasma density plays dual effects on ion energy flux, including the restraint of the ion energy in the sheath and the impelling of the ion number colliding on the material surface. When the plasma density is relatively low, the former plays a dominant role and its effect on energy flux is significant; as plasma density grows higher, the latter plays a more important role and the effect of plasma density tends towards weaker.
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