Abstract:Holographic exposure (i.e., exposure of a photoresist coated substrate in an interference field of two light beams), followed by development in alkaline solution and subsequent ion-beam etching, remains to be the most important technique for fabricating diffraction gratings, especially large-area gratings, despite the advance of other techniques. In this process as an intermediate product the photoresist grating serves as a mask for ion-beam etching. The shape and critical dimensions of the photoresist mask directly determine the shape and critical dimensions of the etched end product, which in turn determine the performance parameters of the grating. In a crude and yet often effective approximation the shape of the mask can be taken as rectangular and the critical dimension is duty cycle (ratio of ridge width to period). The groove depth is not critical, as long as it is large enough, and it can be controlled easily by adjusting the photoresist layer thickness during spin coating and by detecting the critical turning point of the diffraction efficiency curve of one of the grating's dispersive orders during development when the photoresist in the trough is completely removed. Once the maximum groove depth has been reached the following development process predominantly manifests as reduction of duty cycle. While the efficiency monitoring method is effective for detecting the point of trough clearing, it is ineffective for measuring duty cycle. A one-dimensionally periodic grating is an optically anisotropic structure when the groove period and light wavelength are comparable. Diffraction efficiencies of TE and TM polarizations are different and their ratio is a monotonic function of duty cycle in the range of duty cycle of interest. We propose to use this property to estimate the duty-cycle of surface-relief holographic gratings during development. We will present our theoretical simulation results and experimental results.

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Blazed Gratings with Both Controllable Blaze Angle and Anti-Blaze Angle Fabricated by Using a Twice Oblique Ion Beam Etching Method.

Fabrication Of Extreme-Ultraviolet Blazed Gratings By Use Of Direct Argon-Oxygen Ion-Beam Etching Through A Rectangular Photoresist Mask

Fabrication of Large Grating by Monitoring the Latent Fringe Pattern

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Improved Master-Replica Separation Process for Fabrication of A Blazed Concave Grating by Using A Combination-Type Convex Grating

Application of Broad-Beam Scanning Exposure to Fabricate Low-Wavefront-error Holographic Gratings

Single-Step Fabrication of Highly Tunable Blazed Gratings Using Triangular-Shaped Femtosecond Laser Pulses

Fabrication of Optical Mosaic Gratings by Consecutive Holographic Exposures Employing A Latent-Fringe Based Alignment Technique

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Holographic Fabrication of Two-Dimensional Scale Gratings for Surface Encoder by Using an Orthogonal Type Two-Axis Lloyd's Mirror Interference Lithography

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Fabrication of Low-Stray-Light Gratings by Broad-Beam Scanning Exposure in the Direction Perpendicular to the Grating Grooves

In situ estimate of duty cycle of surface-relief holographic gratings during development by measuring TM/TE diffraction efficiency ratio

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High-Efficiency Multilayer-Coated Ion-Beam-Etched Blazed Grating in the Extreme-Ultraviolet Wavelength Region

On-line Measurement of Profile Parameters of Rectangular Holographic Photoresist Gratings During Development

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Design of New Type of Isosceles Blazed Grating