Tunable Index Back End of Line Platform for Enhanced Integrated Photonics
F. Y. Gardes,Cosimo Lacava,Kapil Debnath,T. D. Bucio,M. Banakar,S. Stankovic,A. Alattili,A. Z. Khokhar,S. Saito,P. Petropoulos,I. Molina-Fernandez,Robert Halir,A. Ortega-Monux,J. G. Wanguemert-Perez,Yang Chen,Jian-Jun He,Pavel Cheben,Jens H. Schmid
DOI: https://doi.org/10.1109/group4.2017.8082208
2017-01-01
Abstract:We demonstrate a back end of line compatible SiN based material with tunable refractive index enabling low optical loss, high non-linear Kerr response, low index photonic crystals, high efficiency couplers, low loss waveguides and temperature tolerant MUX for DWDM