Simulation Design of Surface Acoustic Wave Sensor Based on Langasite Coplanar Integration with Multiple Parameters
Xiaorui Liang,Yongwei Zhang,Fangmeng Xu,Qiulin Tan,Juan Zhang
DOI: https://doi.org/10.3390/mi13050705
IF: 3.4
2022-04-29
Micromachines
Abstract:In the harsh environment of high temperature and high rotation, a single parameter is difficult to satisfy the multi-parameter test requirements of aerospace metallurgy. Therefore, a multi-parameter coplanar integrated surface acoustic wave (SAW) sensor based on Langasite (LGS) is proposed. In this paper, the optimal cut for different measurement parameters is analyzed, and the optimal cut to temperature, pressure and vibration are obtained. The simulation results show that (0°, 138.5°, 25°) LGS has superior second-order temperature sensitivity, the edge of the rectangular sealed cavity is more suitable for pressure sensors, and the optimal cut is (0°, 138.5°, 30°). The stress of the vibration sensor cantilever beam is mainly concentrated on the edge of the fixed end, and the optimal cut is (0°, 138.5°, 35°). Based on the optimal sensitive tangential direction of each sensitive element and the symmetry of the Langasite wafer, the reasonable layout of the coplanar integrated structure with the three parameters of temperature, pressure and vibration is determined. Moreover, according to the optimal orientation selection and reasonable structure layout of each parameter, combined with frequency separation rules, the parameters of interdigital electrode were determined, and the idea of multi-parameter integrated design was simulated and verified.
chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied