Nanoparticle WO3 Thin Film NO2 Sensors from White Tungstic Acid

XIA Xiao-dong,LIU Yan-li,JIANG Jian-hui,SHEN Guo-Li,YU Ru-qin
DOI: https://doi.org/10.3969/j.issn.1004-1699.2005.01.007
2005-01-01
Abstract:Thin film NO_2 sensors were fabricated from SiO_2-doping WO_3 nanoparticles with various SiO_2 contents (0%~10%, wt%). The WO_3 powder was obtained by the means of thermal pyrolysis of white tungstic acid starting from Na_2WO_3 then followed with ultrasonic treatment, and the SiO_2 powder was synthesized via the route of sol-gel. The SiO_2-WO_3 nanosize composites were prepared from solid-phase reactions and characterized by XRD. The average grain size of the composites was 62 nm. The sensitive films were structured on the Al_2O_3 substrate with Au electrode. This Taguchi-type sensor shows a linear response to NO_2 in the concentration range of 5×10\+\{-6\} to 30×10\+\{-6\}. It exhi-bits some advantages, such as simplicity of preparation, rapidity of measurement, and satisfactory stability and reproducibility.
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