System Simulation of MEMS Microaccelerometer

Liu Yu,Wen Zhiyu,Zhang LiuQiang,Liang Yuqian

DOI: https://doi.org/10.3321/j.issn:1004-132X.2005.z1.102

2005-01-01

Abstract:Several methodologies of system-level simulation adapted to MEMS were introduced, including the basic idea, construction method, as well as advantages and disadvantages respectively. And results of the system-level simulation of the comb capacitive microaccelerometer are given.

What problem does this paper attempt to address?

A New Modeling Method of MEMS System's Noise

ZHANG Xia,ZHENG Xu-dong,ZHENG Yang-ming,LUO Si-jian,WANG Yue-lin,JIN Zhong-he

DOI: https://doi.org/10.3969/j.issn.1004-1699.2008.03.034

2008-01-01

Abstract:This paper proposed a behavioral level simulation and modeling method based on Simulink within Matlab.MEMS gyroscope simulation system is built,using motion equations and transfer functions,by picking-up mechanical parameters of micromachined gyroscope and main parameters in external circuits.Noise of gyroscope and circuits are added in the simulation platform.Then,noise performance of AD630 demodulation circuit is simulated and tested;the optimized application of this circuit is analyzed.
Structure Design And System Simulation Of 2-D Microaccelerometer

Y Liu,Zy Wen,Lq Zhang,Yq Liang

2005-01-01

Abstract:Research of the microsensor based on MEMS technology is full of activity and value, while study on the microaccelerometer is always the hot issue with challenge and potential in this field. This paper presents a novel 2-D capacitive microaccelerometer, and analysis about mechanical, structure sensitivity as well as cross-axis sensitivity. The results of theoretic analysis and system simulation show that this kind of accelerometer has good properties and excellent ability to resist disturbance in transverse direction.
Modeling and Simulation of Micromachined Gyroscope

ZHANG Xia,ZHENG Xu-dong,WANG Hao,JIN Zhong-he

DOI: https://doi.org/10.3785/j.issn.1008-973x.2009.04.008

2009-01-01

Abstract:A system level model was built according to the dynamic equation of micromachined gyroscope with electromagnetic driving and capacitive detecting and the transfer functions of the interface circuits on Simulink platform in order to reduce the noise of micromachined gyroscope system and enhance system resolution.Mechanical-thermal noise of sensor,electronic-thermal noise of circuits and coupling effects in sensor were added to the model.Therefore,the model not only could get the functional simulation results of gyroscope system,but also could quantify the effect of each noise source on system performance and find the main noise source under different coupling effects.Simulation results show that capacitance-voltage(CV) conversion circuit was the main noise source when the coupling effects in gyroscope were weak;the band-pass filter of gyroscope self-excitation circuit became the main noise source when the coupling effects were robust.Simulation results were validated with the experiment.
A System-Level Simulation of Force-Balance MEMS Accelerometers by VHDL_AMS

Xiaochuan Tang,Yufeng Zhang,Weiping Chen,Xiaowei Liu

DOI: https://doi.org/10.1117/12.819564

2008-01-01

Abstract:Micromachined accelerometers are one of the most widely used MEMS transducers. The theory of force-balance MEMS accelerometers is presented in the thesis. Meanwhile the paper accomplishes the system-level simulation and analysis of the force-balance MEMS accelerometer with different structure parameters. Based on the analysis, the conclusion is that the parameters of folded-spring (such as the length of the beam, the width of the beam) especially influence the output sensitivity.
System-Level Modeling and Simulation of Force-Balance MEMS Accelerometers

Zhang Yufeng,Liu Xiaowei,Chen Weiping

DOI: https://doi.org/10.3321/j.issn:0253-4177.2008.05.022

2008-01-01

Journal of Semiconductors

Abstract:This paper presents two approaches for system-level simulation of force-balance accelerometers. The derivationof the system-level model is elaborated and simulation results are obtained from the implementation of those strategies onthe fabricated silicon force-balance MEMS accelerometer. The mathematical model presented is implemented in VHDL-AMS and SIMULINK TM,respectively. The simulation results from the two approaches are compared and show a slightdifference. Using VHDL-AMS is flexible,reusable,and more accurate. But there is not a mature solver developed for thelanguage and this approach takes more time, while the simulation model can be easily built and quickly evaluated usingSIMULINK.
A Novel Hybrid Macromodel for MEMS System-Level Modeling and Simulation

Jinghui Xu,Weizheng Yuan,Xianglian Lü,Honglong Chang

DOI: https://doi.org/10.3969/j.issn.1000-2758.2008.04.007

2008-01-01

Xibei Gongye Daxue Xuebao/Journal of Northwestern Polytechnical University

Abstract:Our brief review of existing literature at the start of our paper reveals the disadvantages of using only analytical or numerical macromodel as system-level modeling method. In our opinion, a hybrid macromodel combining analytical macromodel with numerical macromodel offers more attractive advantages. We now present the results of our research on this interesting and, to our knowledge, new subject. First, the MEMS device was decomposed into several combinations of simple components and complex ones. Then the analytic method was used to establish the macromodel of the simple components, and the numerical method was used to establish the macromodel of the complex components. Finally, these macromodel were interconnected to each other according to the original topology of the device for the system-level modeling and rapid simulation. We have demonstrated the excellence of the hybrid macromodel by a z-axis micro accelerometer. The macromodel of the plate mass and the parallel plate capacitor were constructed by the analytical method because of their regular and simple shapes, while the macromodel of the four folded beams were constructed by the numerical method because of their irregular shapes, then these macromodel were interconnected to each other in order to establish the system-level hybrid model. At last, the model was simulated in SaberTMsimulator. The results agreed very well with that of ANSYS (error less than 2%), and the transient simulation time was less than 2min. This shows that the method was efficient for rapidly performing MEMS system-level design.
Design of a Micro Capacitive Acceleration Sensor Based on MEMS

程未,曾晓鹭,卞剑涛,冯勇建

DOI: https://doi.org/10.3969/j.issn.1000-9787.2003.08.025

2003-01-01

Abstract:Structure and process of a micro capacitive acceleration sensor based on MEMS technology were given.So did the fabrication process.With the purpose of grasping the sensor's characters of mechanics and electrics,its mechanics model was discussed.On this basis the sensor's modal analysis was made.In order to get the nonlinear relationship between the acceleration and capacitive signal,an effective method based on FEA was proposed.The detail processing steps was designed,which explained the feasibility of the fabrication.The sensor has advantages of simple structure,operation reliability and the wide work range.Using this set of method,sensors with different test ranges can be designed and fabricated.
A System Level Simulation of Bulk Micromachined CMOS-MEMS Integrated Gyroscope

Jia WANG,Liang QIAN,Zhen-chuan YANG,Gui-zhen YAN

DOI: https://doi.org/10.3969/j.issn.1004-1699.2008.04.007

2008-01-01

Abstract:CMOS-MEMS monolithic integration is a good way to improve the performance of MEMS sensors, but the integration technology requires more critical designs of the gyro and the signal conditioning circuits. A system level simulation of bulk micromachined CMOS-MEMS gyroscope was achieved by building an equivalent circuit model for the gyroscope. The structure of the gyroscope, the circuits, the parasitic effect and the manufacturing variations were analysed to understand the influences between each other. The simulation results can be used to improve the design of the integrated CMOS-MEMS sensors.
System-level Modeling and Simulation for an Electrostatic-Feedback Microaccelerometer Based on Equivalent Electrical Representation

Yongquan Wang,Hualing Chen,Xueming He

DOI: https://doi.org/10.1007/s00542-006-0361-2

2007-01-01

Microsystem Technologies

Abstract:A rapid and accurate system-level modeling and simulation for a novel electrostatic-feedback microaccelerometer, based on equivalent networks and electrical analogies, are presented in this paper. With the employment of the structured design strategy, the system is hierarchically decomposed at first, and the macromodel of the elementary transducer (a variable capacitor), is accordingly generated using the nodal analysis method, with the form of matrix or network. Based on this, the two types of differential capacitors, which respectively serve as sense and feedback elements, are mainly discussed and modeled. Expressed as equivalent circuits, they are coupled with the outside components, constructing an equivalent electrical representation that describes the completed mixed-domain system. The validity of the proposed model is verified by a good agreement between the simulation results implemented in the electrical simulator, OrCAD/Pspice, and those from VHDL-AMS approach. Then, some dynamic characteristics of the system are discussed. This computational prototyping provides a valuable foundation for further predictable optimal design for the product, with great benefit in reducing the costs and improving the effectiveness.
Method of System-level Dynamic Simulation for A MEMS Cantilever Based on the Mechanical Description

ZHANG Jian,LI Wei-hua

DOI: https://doi.org/10.3969/j.issn.1004-1699.2006.05.016

2006-01-01

Abstract:The idea of establishing the equivalent lumped mechanical description based on the mechanical analysis in combine with the energy principle is proposed, which is used for implementing the system-level simulation of the dynamic behavior of the eletro-mechanical coupled cantilever beam. By making use of the feedback function of the controlled sources to implement the coupling, the established equivalent circuits can simulate the transfer characteristic, transient response and inherent frequency of the beam under electrostatic loads. Simulation from Saber has confirmed the validity of the method.
Direct Simulation Analysis of Electromechanical Coupling and Joule Heating Effect of a MEMS SiC Piezoresistive Accelerometer

Yanxin Zhai,Tiantong Xu,Guoqiang Xu,Xiaoda Cao,Chunhui Yang,Haiwang Li

DOI: https://doi.org/10.1109/ifeea57288.2022.10037835

2022-01-01

Abstract:MEMS accelerometers have been used in various fields of life, and the design methods for MEMS accelerometers are mature nowadays. But in the design of piezoresistive accelerometers, the general method of structural mechanics simulation combined with circuit theoretical models inevitably involves parameter assumptions and simplification of electrical models, which will introduce calculation error. Therefore, in this paper, a direct numerical simulation method using COMSOL is carried out for a SiC MEMS piezoresistive accelerometer. The electromechanical coupling simulation of the sensor is realized by combining the structural mechanics simulation with the current domain simulation. At the same time, the circuit thermal effect is introduced into the simulation process to realize the coupled calculation of the temperature field. This simulation method can effectively avoid the errors caused by the theoretical model, and at the same time provide technical support for the development of the machine-electric-thermal field system coupled simulation.
A Hybrid System-Level Modeling and Simulation Methodology for Structurally Complex Microelectromechanical Systems

Jinghui Xu,Weizheng Yuan,Jianbing Xie,Honglong Chang,Binghe Ma

DOI: https://doi.org/10.1109/jmems.2010.2100022

IF: 2.829

2011-01-01

Journal of Microelectromechanical Systems

Abstract:We present a hybrid system-level modeling and simulation methodology by combining numerical macromodels with parameterized lumped-element behavioral models for structurally complex microelectromechanical systems (MEMS). We decompose the MEMS into several functional components. For those components with complex geometry and boundary conditions, we model them using numerical macromodels, whereas for those with simple geometry, we model them using parameterized lumped-element behavioral models. Both models are represented by the same syntax and similar equation forms to ensure the compatibility. Afterward, the hybrid numerical macromodels and parameterized behavioral models are inserted into the same simulator and then interconnected to each other according to the original topography of the MEMS for system-level simulation. As one of the key technologies of the proposed methodology, macromodeling has been improved in two aspects. First, macromodeling for the component with dynamic boundary condition is achieved by combining modal analysis with a novel iterated improved reduced system method. Second, angular parameterization for the components with the same geometry but different initial orientation is achieved by the matrix coordinate transformation. A z-axis micromachined gyroscope is used to demonstrate the proposed methodology. Simulation results show that the method can efficiently support the design for structurally complex MEMS. [2010-0007]
Hybrid Macromodels for Modeling and Simulation of a Z-Axis Micro Accelerometer

Jinghui Xu,Weizheng Yuan,Honglong Chang,Xianglian Lv,Yiting Yu

DOI: https://doi.org/10.1109/nems.2008.4484351

2008-01-01

Abstract:A design method based on hybrid macromodels for system-level modeling and simulation of MEMS devices was presented, by which the MEMS device was firstly divided into several substructures, then macromodels for the substructures with regular geometry were generated by analytical method and the ones with odd geometry by numerical method. After that, the created macromodels were interconnected according to the original topology of the MEMS device for system-level simulation. The method combines the advantages of both the analytical and numerical methods. Therefore, not only the parameterized design for some key components can be performed, but also the innovative design for some odd substructures can be realized. In the paper, we took the design of a z-axis micro accelerometer as an example to demonstrate the feasibility and efficiency of the proposed method.
Co-simulation of MEMS and Circuits in Zeni VLG

YUAN Wei-zheng,NIU Hao-bin,CHANG Hong-long,MA Bing-he

DOI: https://doi.org/10.3788/ope.20101810.2206

2010-01-01

Optics and Precision Engineering

Abstract:To predict the behaviors of the whole Micro-electro-mechanical System(MEMS) including MEMS devices and circuits,a prototype system for co-simulating MEMS devices and circuits was established.Firstly,the common characteristics of MEMS system-level simulation and analog circuit simulation were studied,and the principle and the method of co-simulating MEMS devices and circuits were presented.Based on the circuit simulation platform Zeni VLG,the frame of the prototype system was established.Then,two parametric model libraries which were essential for the prototype system were also established,respectively,according to the modified nodal analysis method and analog circuit behavioral modeling method.A seesaw accelerometer with an open-loop circuit and a closed-loop circuit was used to verify the system and the models.By comparing to the commercial software SaberTM,obtained results indicate that the relative error is 2.1% in the open-loop simulation.The simulation results show that the prototype system could handle co-simulations of MEMS devices and circuits effectively,and has a high accuracy.
Verilog-A modeling and design of a micromachined capacitive accelerometer

Li Haojiong,Zhang Mingming,Chen Zhongjian,Huang Jingqing

DOI: https://doi.org/10.1109/EDSSC.2011.6117734

2011-01-01

Abstract:In order to design accelerometers, electromechanical hybrid simulation with the sensor and interface circuit together is required. In this paper a Verilog-A model for the accelerometer sensor is presented, and based on the Verilog-A model presented, an open-loop capacitive accelerometer with a full-scale range of ±2g is presented. The Verilog-A model, characterizing the properties of the sensor, is compared to be right with the Matlab model published before. The accelerometer is tested to achieve the equivalent noise acceleration (ENA) about 7.7μg/√Hz.
Design of Micromachined Capacitive Accelerometer System

XIE Lei,SU Wei,CHEN Quan-gen

DOI: https://doi.org/10.3969/j.issn.1000-9787.2007.11.024

2007-01-01

Abstract:In order to hold the design of the accelerometers,the model of silicon micromachined capacitive accelerometer in mechanical domain is designed,a fully-differential 2nd order sigma-delta analog-to-digital converter(ADC) for use as an interface circuit for accelerometers to sense the acceleration is researched,and the circuit to sense the little change of the capacitor is improved.The MEMS design tools ConentorWare are used to deal with the simulation about the system combined the mechanical and electronical models,and show the results.Useful reference in design of whole system,which is closer to the practice is provided.
MEMS Simulation & Model Establishment

Yong Xue-jun

Abstract:MEMS originates from micro-electronics processing technology and integrates micro-mechanical manufacturing,sensing,actuation,and micro-control.The system covers a variety of physical fields such as force,power,flow,light,magnet,and heat.With the rapid development of model establishment and simulation technology,the article studies the basic theories and methods of MEMS model establishment simulation.

Engineering
Modeling and Simulation of Micromachined Accelerometer Using Multi-Port-Element Network Method

霍鹏飞,马炳和,苑伟政

DOI: https://doi.org/10.3321/j.issn:1000-6893.2003.05.019

2003-01-01

Abstract:A method for modeling and simulation of MEMS based on multi-port-element network is presented. With this method, the functional components of inertial MEMS are modeled as multi-port-elements and a crab-leg accelerometer is represented as a network composed of these models. All the models are coded in the analogy hardware description language of MAST and simulated on the Saber simulator. With this approach, the system behavior can be rapidly analyzed and the influence of its parameters on the system performance can be evaluated. The simulation of modal frequency of the crab-leg accelerometer model agrees to that of the finite element analysis (within 1.0%). Simulation results indicate that the system sensitivity is seriously influenced by the width of the crab-leg beam, so the fabrication error of the beam width should be reduced as much as possible. The system responses to sinusoidal and pulse input signals are also investigated.
Review of Research on Macromodel for MEMS System-level Simulation

关乐,褚金奎,齐东周,王晓东,王立鼎

2009-01-01

Abstract:Most of typical MEMS are composed of functional devices restraint in multiple energy domains and integrate sensing or testing circuit units for signal processing.The method based on macromodel to simulate static and dynamic behavior characteristic of MEMS has become a famous research field.Macromodeling methods were reviewed and summarized for MEMS devices especially referred to two strategies:the superposition of basic function based on Galerkin method and the matrix subspace projection based on finite element equations.The advantages and disadvantages of each implementation were analyzed and then some selection principle was proposed when utilizing them.The main difficulties of system-level simulation were discussed and finally the development direction for macromodeling was indicated.
The Research on MEMS Micro Capacitance Sensor Detection Based on MS3110

Hui Jun Yu,Zi Qiao Ding,Xiao Ping He,Lian Ming Du,Hao Qu,Wu Zhou,Bei Peng

DOI: https://doi.org/10.4028/www.scientific.net/kem.645-646.528

2015-01-01

Key Engineering Materials

Abstract:A universal capacitive readout integrated circuit MS3110 is used to measure capacitances in micro capacitance sensor. The configuration, operating principle and process of MS3110 are introduced and a method of programming the inner register on-chip with STM32 is presented with the control block diagram. Performance of MS3110 has been tested by the inner adjust capacitance. A comb micro accelerometer is designed and manufactured. A tentative equivalent electric model of accelerometer is built according to a series of capacitance tests, and the influence of parasitic capacitance in accelerometer system is discussed.

System Simulation of MEMS Microaccelerometer

A New Modeling Method of MEMS System's Noise

Structure Design And System Simulation Of 2-D Microaccelerometer

Modeling and Simulation of Micromachined Gyroscope

A System-Level Simulation of Force-Balance MEMS Accelerometers by VHDL_AMS

System-Level Modeling and Simulation of Force-Balance MEMS Accelerometers

A Novel Hybrid Macromodel for MEMS System-Level Modeling and Simulation

Design of a Micro Capacitive Acceleration Sensor Based on MEMS

A System Level Simulation of Bulk Micromachined CMOS-MEMS Integrated Gyroscope

System-level Modeling and Simulation for an Electrostatic-Feedback Microaccelerometer Based on Equivalent Electrical Representation

Method of System-level Dynamic Simulation for A MEMS Cantilever Based on the Mechanical Description

Direct Simulation Analysis of Electromechanical Coupling and Joule Heating Effect of a MEMS SiC Piezoresistive Accelerometer

A Hybrid System-Level Modeling and Simulation Methodology for Structurally Complex Microelectromechanical Systems

Hybrid Macromodels for Modeling and Simulation of a Z-Axis Micro Accelerometer

Co-simulation of MEMS and Circuits in Zeni VLG

Verilog-A modeling and design of a micromachined capacitive accelerometer

Design of Micromachined Capacitive Accelerometer System

MEMS Simulation & Model Establishment

Modeling and Simulation of Micromachined Accelerometer Using Multi-Port-Element Network Method

Review of Research on Macromodel for MEMS System-level Simulation

The Research on MEMS Micro Capacitance Sensor Detection Based on MS3110