Study of N-Type Electrical Conductivity in Deuterated Boron-Doped Diamond

YU Lin,LIU Dong-hong,HU Lian-jun,DAI Ying,LONG Run,YAN Cui-xia
DOI: https://doi.org/10.3321/j.issn:1001-9731.2005.12.007
2005-01-01
Abstract:The absence of a shallow donor in diamond with reasonably room temperature has become one of the key obstacle to make diamond-based semiconductor devices.Most recently it has been reported that exposure of p-type(B doped) homoepitaxial diamond layers to deuterium plasma can result in the formation of n-type diamond with a shallow donor state.It's the first time we can identify a shallow donor state in homoepitaxial damond.In this paper,the newly progress on research of conductivity type transition in diamond has been reviewed and analyzed.
What problem does this paper attempt to address?