Colored Petri Net Based Hierarchical Scheduling Model for Semiconductor Production Line

Qiao Fei,Li,Wu Qidi
DOI: https://doi.org/10.1109/wcica.2004.1343071
2004-01-01
Abstract:In this paper a kind of scheduling model and its modeling approach are studied for reentrant semiconductor production line. By introducing multi-dimensional color sets and machine group oriented hierarchy, a kind of colored Petri net based hierarchical scheduling model is proposed. Then, a case study of the proposed model is illustrated with an example semiconductor production line, which includes 5 machines and 6 steps. The modeling approach is combined top-down structure modeling and bottom-up parameter definition. At last, some further discussion about the application of the proposed Petri net model are given.
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