Correction Algorithm of Random Phase Shifting Errors in Phase Measuring Profilometry

王立无,苏显渝,周利兵
DOI: https://doi.org/10.3321/j.issn:0253-2239.2004.05.009
2004-01-01
Abstract:In phase-measuring profilometry, the random phase shifting error is an important factor that leads to measuring errors. A correction algorithm of random phase shifting errors is proposed on the basis of five-step. This algorithm can directly solve random phase shifting errors without solving the phase by approximate treatment. It can greatly reduce the number of iteration and calculation with the intended accuracy. The formulas of this algorithm are induced and the process to solve random phase shifting is indicated. The validity of this algorithm has been demonstrated by means of computer simulation and experiment. It can greatly reduce the number of iteration and calculation in comparison with the algorithm of In-Bok Kong. It can be used for phase-shifting interferometry.
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