Abstract:Titanium dioxide (TiO2) in the form of thin films has attracted enormous attention for photocatalysis. It combines the fundamental properties of TiO2 as a large bandgap semiconductor with the advantage of thin films, making it competitive with TiO2 powders for recycling and maintenance in photocatalytic applications. There are many aspects affecting the photocatalytic performance of thin film structures, such as the nanocrystalline size, surface morphology, and phase composition. However, the quantification of each influencing aspect needs to be better studied and correlated. Here, we prepared a series of TiO2 thin films using a sol-gel process and spin-coated on p-type, (100)-oriented silicon substrates with a native oxide layer. The as-deposited TiO2 thin films were then annealed at different temperatures from 400 °C to 800 °C for 3 h in an ambient atmosphere. This sample synthesis provided systemic parameter variation regarding the aspects mentioned above. To characterize thin films, several techniques were used. Spectroscopic ellipsometry (SE) was employed for the investigation of the film thickness and the optical properties. The results revealed that an increasing annealing temperature reduced the film thickness with an increase in the refractive index. Atomic force microscopy (AFM) was utilized to examine the surface morphology, revealing an increased surface roughness and grain sizes. X-ray diffractometry (XRD) and UV-Raman spectroscopy were used to study the phase composition and crystallite size. The annealing process initially led to the formation of pure anatase, followed by a transformation from anatase to rutile as the annealing temperature increased. An overall enhancement in crystallinity was also observed. The photocatalytic properties of the thin films were tested using the photocatalytic decomposition of acetone gas in a home-built solid (photocatalyst)-gas (reactant) reactor. The composition of the gas mixture in the reaction chamber was monitored using in situ Fourier transform infrared spectroscopy. Finally, all of the structural and spectroscopic characteristics of the TiO2 thin films were quantified and correlated with their photocatalytic properties using a correlation matrix. This provided a good overview of which film properties affect the photocatalytic efficiency the most.

Studies of Photo-induced Characteristics of Nanoscale Titanium Dioxide Thin Films Grown by RF Magnetron Sputtering

Investigation of microstructure evolution in Pt-doped TiO2 thin films deposited by rf magnetron sputtering

Photoelectrochemical Characteristics of Nano-Titanium Dioxide Thin Films Prepared by RF Magnetron Sputtering

Controllable Hydrothermal Synthesis, Optical and Photocatalytic Properties of TiO2 Nanostructures

Studies of Hydrophilicity of Nanoscale Titanium Dioxide Thin Films Prepared at Room Temperature

Photo-induced catalytic characteristics of TiO2 thin films deposited by DC reactive magnetron sputtering

TiO2 films prepared by DC reactive magnetron sputtering at room temperature: Phase control and photocatalytic properties

Oxidation Conditions of Ti and Photocatalysis of TiO2 Ceramic Films

Photocatalytic Performance of Sol-Gel Prepared TiO2 Thin Films Annealed at Various Temperatures

Crystallization Behaviors of TiO2 Films Derived from Thermal Oxidation of Evaporated and Sputtered Titanium Films

Effect of substrate temperature and annealing on the growth of TiO2‐x thin films deposited by using DC‐magnetron sputtering technique

Influence of Annealing Temperature on the Properties of Titanium Oxide Thin Film

Synthesis, Phase Transition and Optical Properties of Nanocrystalline Titanium Dioxide Films Deposited by Plasma Assisted Reactive Pulsed Laser Deposition

Control of Microscopic Morphology and Structure of One Dimensional Titanium Dioxide Nanomaterials

Influence of Substrate on Structural, Morphological and Optical Properties of TiO2 Thin Films Deposited by Reaction Magnetron Sputtering

Investigations of Tio2 Films Prepared by Reactive Magnetron Sputtering

Influence of preparation technique on the microscopic structure and surface morphology of nanometer TiO2 thin films

The Research On Hydrophilic Properties Of Tio2 Thin Film Prepared By Dc Magnetron Sputtering

EFFECTS OF ANNEALING ON THE COMPOSITION, STRUCTURE AND PHOTOCATALYTIC PROPERTIES OF C-DOPED TITANIA FILMS DEPOSITED BY REACTIVE MAGNETRON SPUTTERING USING CO2 AS CARBON SOURCE

Structural and Optical Properties of Titanium Oxide Thin Films Deposited on Unheated Substrate at Different Total Pressures by Reactive Dc Magnetron Sputtering with A Substrate Bias

STRUCTURE AND OPTICAL PROPERTIES OF HIGH-RATE LOW-TEMPERATURE GROWN TiO2 THIN FILMS BY REACTIVE MAGNETRON SPUTTERING