MEMS-fabricated ICPF Actuators for Biological Manipulation

WL Zhou,WJ Li,JD Mai
DOI: https://doi.org/10.1117/12.484387
2003-01-01
Abstract:Ionic Conducting Polymer Film (ICPF) micro grippers with multi-finger configurations were developed using spin-on Nafion and photolithographic technology. A commercial solution from Dupont Co. (Nafion SE-5012) was used to prepare similar to0.2mum thick ionic conducting polymer film. Micro cantilever structures were fabricated which composed of Au/Nafion/Au film layers. Grippers with 2-finger and 4-finger configurations were successfully developed. We have proved that the 2-fingered grippers can be actuated in water at similar to5V DC voltages. The smallest 4-fingered grippers fabricated were 30mum wide, 300mum long and 0.4mum thick for each finger. In addition, another interesting actuation behavior of the micro actuator was observed during fabrication. The actuators would curl up whenever they came in contact with water during the sacrificial release process. The curling process reversed instantaneously when the actuators are immersed in acid. We suggest that this phenomenon is probably due to the different volume expansions of Nafion in different medium. Besides, the current-voltage property was measured. We are further studying the consistency of their behaviors to modify the design and fabrication process for potential use in biological manipulations.
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