Feedback Linearization of Active Electrostatic Levitation Systems

韩丰田,高钟毓,王永梁
DOI: https://doi.org/10.3321/j.issn:1000-0054.2003.02.016
2003-01-01
Abstract:An electrostatic levitation system is required to suspend the rotating rotor of an electrostatic bearing centered in a vacuum cavity. The nonlinearities and negative stiffness characteristics inherent in most types of levitation systems have a significant impact on the control performance. Therefore, a nonlinear controller design based on the dynamic equations for the system model and feedback linearization techniques was utilized to stabilize the levitation system. A three degrees of freedom electrostatic levitation system was designed and constructed to compare the performance of linear and nonlinear digital control schemes in a wellcontrolled experimental environment. The experimental results demonstrate the superiority of nonlinear controllers relative to conventional controllers in terms of performance, stability, and suspension stiffness.
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