1.55 μm Fabry-Perot thermo-optical tunable filter with amorphous-Si as cavity

Yuhua Zuo,Xiao Cai,Rongwei Mao,ChangJun Huang,Buwen Cheng,Chuanbo Li,Liping Luo,Junhua Gao,Yunxia Bai,Lei Jiang,Chaohua Ma,Liangchen Wang,Jinzhong Yu,Qiming Wang
2003-01-01
Abstract:A 1.55 μm Fabry-Perot (F-P) thermo-optical tunable filter is fabricated. The cavity is made of amorphous silicon (a-Si) layer grown by electron-beam evaporation technique. Due to the excellent thermo-optical property of a-Si, the refractive index of the F-P cavity will be changed by heating; the transmittance resonant peak will therefore shift substantially. The measured tuning rang is 12 nm, FWHM (full-width-at-half-maximum) of the transmission peak is 9 nm, and heating efficiency is 0.1 K/mW. The large FWHM is mainly due to the non-ideal coating deposition and mirror undulation. Possible improvements to increase the efficiency of heating are suggested.
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