Grating Fabrication with CW CO2 Laser Irradiation
Dongjiang Wu,C. An,M. Hong,W. J. Wang,Yingzi Peng,Y. Lu
DOI: https://doi.org/10.1117/12.482897
2002-01-01
Abstract:In this paper, we will describe a new method to fabricate optical diffractive gratings on glass surface with direct CW CO2 laser irradiation. A laser beam with linear polarization was focused and scanned on a glass substrate. The interaction of the beam with the material irradiated results in a periodic ridge structure formation on the substrate under a well-controlled laser irradiation dose. Using multi-path scanning method, with a suitable overlap, diffractive grating with large area can be achieved. In this experiment, laser irradiation dose was 50 J/cm2, laser scanning speed was 0.2 mm/s, the diameter of focused beam was 30 μm, and the grating period was about 8 um.