Spontaneous Vacancy Array Formation on FeSi2 and CoSi2 Formed on Si(100) 2×n Surface

JZ Wang,JF Jia,H Liu,JL Li,X Liu,QK Xue
DOI: https://doi.org/10.1063/1.1461904
IF: 4
2002-01-01
Applied Physics Letters
Abstract:Atomic structure of FeSi2 or CoSi2 grown on the Si(100) 2×n surface has been investigated by scanning tunneling microscopy. After annealing the Fe or Co covered Si(100) 2×n substrate at ∼800 °C, an ordered adatom vacancy array appears on the nominal 1×1 surface of the formed FeSi2 or CoSi2 islands, which has not been observed for silicide on the Si(100)–2×1. Upon further annealing to ∼1100 °C, the vacancies coalesce into striped domains along one of the 〈011〉 directions. These nanostructured features are a result of the Ni impurities, and can be a promising template for fabricating nanodot arrays.
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