Influence of Substrates on Photoluminescence for Zno Films Prepared by R. F. Sputtering

QP Wang,DH Zhang,ZY Xue,J Ma
DOI: https://doi.org/10.1117/12.483101
2002-01-01
Abstract:ZnO films were deposited on sapphire, Si, quartz and Corning 7059 glass substrates by r. f. sputtering. A 356 nm UV photoluminescence (PL) peak corresponding to inter-band transition was observed for the films deposited on sapphire, Si and quartz substrates when excited with 270 nm light. For the films prepared on Coming 7059 glass, only a 446 nm blue emission peak originated from electron transition from shallow donor level of oxygen vacancies to the valence band was found. After high temperature annealing in air, the intensity of PL peaks for the films on the former three types substrates increased pronouncedly.
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