Temperature Distribution and Resonance Amplitude of Thermally Excited Micromechanical Beam Resonators

韩建强,朱长纯,刘君华,张声良,段捷
DOI: https://doi.org/10.3321/j.issn:0253-987X.2002.06.011
2002-01-01
Abstract:The temperature distribution along thermally excited micromechanical beam (cantilever or bridge) resonators is derived analytically according to their characteristics and geometry. The amplitude of the time-variant temperature component is high near the excitation point, while is low in points far away from the excitation point. The resonance amplitude of thermally excited micromechanical bridge resonators is calculated based on thermal expansion theory. The length of the bridge resonator is obtained by the mode function. In addition, the influence of internal stress on the amplitude is considered in calculating.
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