Spatial Resolution in External Electro-Optic Measurement

张红波,王瑞,陈开鑫,杨罕,张大明,衣茂斌,王国全,马振昌
DOI: https://doi.org/10.3321/j.issn:0253-4177.2002.07.016
2002-01-01
Abstract:A front-side incident external electro-optic measurement mechanism is reported using 650 nm semiconductor laser diode. A piece of semi-insulated GaP with high reflecting film for red beam in <100> direction is used as external probe tip. Measurement of the effective modulation voltage of the electrode indicates that the electric spatial resolution of the mechanism is less than 1 μm, and the sensitivity the mechanism is of 12.6 mV/√Hz.
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