Opto-Contact Mini-Displacement Measurement Instrument
B Liu,L Yang,J Zhang,Jy Fan
DOI: https://doi.org/10.1117/12.326629
1998-01-01
Abstract:The opto-contact mini-displacement measuring instrument is mainly for mini-displacement measurement. It not only can measure small geometry size, for example silicon chip thickness, but also can measure some other parameters such as small translation, waviness, diameter run-out, vibration. Combining optical, mechanical, electronic and computer technologies, this instrument can do some work automatically like dynamic sampling, real-time processing, on-line measuring.The instrument is based on laser triangulation, it is composed of a CCD, an optical system and a computer, which can sample and process data with high speed. The measuring principle is described as follows: reflected or scattered light by measured surface are received by CCD, since a good relationship between the offset of image point on CCD and the mini-displacement of object located on a reference plane, a mathematical model can be founded, then the mini-displacement may be calculated according to the offset of image point position on CCD. It's measuring rang is +/- 500 mu m, and precision resolution is +/- 0.1 mu m.