Characterization and Modeling of A Curved Electrostatic Actuator

SY Liu,XY Ye,ZY Zhou
DOI: https://doi.org/10.1515/ijnsns.2002.3.3-4.603
2002-01-01
International Journal of Nonlinear Sciences and Numerical Simulation
Abstract:This paper describes the simulation and operation characteristics of a curved electrostatic actuator. A curved cantilever beam is utilized as the top electrode of the actuator in order to increase the output displacement and decrease the driven voltage at the same time. The pull-in behavior of the curved cantilever is evaluated by a simplified theoretical model using energy methods. The dynamic behavior including the fall time and the rise time of the cantilever is calculated. We use the dynamic Euler equation to estimate the fall time. The simple one freedom model is used to simulate the rise time.
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