Abstract:A dense array of parallel single-walled carbon nanotubes (SWNTs) as the device channel can carry higher current, be more robust, and have smaller device-to-device variation, thus is more desirable for and compatible with applications in future highly integrated circuits when compared with single-tube devices. The density of the parallel SWNT arrays and the diameter of SWNTs both are key factors in the determination of the device performance. In this paper, we present a new multiple-cycle chemical vapor deposition (CVD) method to synthesize horizontally aligned arrays of SWNTs with densities of 20-40 SWNT/μm over large area and a diameter distribution of 2.4 ± 0.5 nm on the quartz surface based on a methanol/ethanol CVD method. The high nucleation efficiency of catalyst particles in multiple-cycle CVD processes has been demonstrated to be the main reason for the improvements in the density of SWNT arrays. More interestingly, we confirmed the existence of an etching effect, which strongly affects the final products in the multiple-cycle growth. This etching effect is likely the reason that only large-diameter SWNTs were obtained in the multiple-cycle CVD growth. Using these high-density and large-diameter nanotube arrays, two-terminal devices with back-gates were fabricated. The performances of these devices have been greatly improved in overall resistance and on-state current, which indicates these SWNT arrays have high potential for applications such as interconnects, high-frequency devices, and high-current transistors in future micro- or nanoelectronics.

Grapevine-like Growth of Single Walled Carbon Nanotubes among Vertically Aligned Multiwalled Nanotube Arrays

Growth Mechanism of Vertically Aligned Carbon Nanotube Arrays

Rapid Growth of Well-Aligned Carbon Nanotube Arrays

Long and Oriented Single-Walled Carbon Nanotubes Grown by Ethanol Chemical Vapor Deposition

Selective growth of semiconducting single-walled carbon nanotubes solely from carbon monoxide

Ultralow Feeding Gas Flow Guiding Growth of Large-Scale Horizontally Aligned Single-Walled Carbon Nanotube Arrays

Electric-Field-Directed Growth of Aligned Single-Walled Carbon Nanotubes

Grow Single-Walled Carbon Nanotubes Cross-Bar in One Batch

Synthesis of aligned carbon nanotube and their growth mechanism by chemical vapour deposition method

Direct Growth of Macroscopic Fibers Composed of Large Diameter SWNTs by CVD

The growth of multi-walled carbon nanotubes with different morphologies on carbon fibers

Cobalt Ultrathin Film Catalyzed Ethanol Chemical Vapor Deposition Of Single-Walled Carbon Nanotubes

Efficient growth of horizontally aligned single-walled carbon nanotubes by chemical vapor deposition over MgO-supported bimetallic co-based catalysts.

Synthesis of High-Density, Large-Diameter, and Aligned Single-Walled Carbon Nanotubes by Multiple-Cycle Growth Methods

Film growth of pillars of multi-walled carbon nanotubes

Fabrication of Ultralong and Electrically Uniform Single-Walled Carbon Nanotubes on Clean Substrates

Preferential Growth of Single-Walled Carbon Nanotubes on Silica Spheres by Chemical Vapor Deposition

Substrate-Site Selective Growth of Aligned Carbon Nanotubes

Layered Growth of Aligned Carbon Nanotubes Arrays on Silicon Wafers

Compound growth and microstructure of carbon nanotube

Growth of Single-Walled Carbon Nanotubes from Discrete Catalytic Nanoparticles of Various Sizes