TLP diffusion bonding of Si3N4 ceramics using Ti/Ni/Ti multilayer and controlling of joints' quality

Gui-sheng ZOU,Ai-ping WU,Jia-lie REN,Sheng LI,Wei-jia REN
DOI: https://doi.org/10.3969/j.issn.1005-5053.2001.01.005
2001-01-01
Abstract:TLP diffusion bonding of Si3 N4 ceramics with Ti/Ni/Ti multilayer was investigated. The existing time of Ni-Ti transient liquid phase is short, and the strength of the interface formed within this duration is very low. The formation of strong joints needs further solid-state diffusion reaction, and its microstructures is Si3N4/TiN/TisSi3 + TisSi4 + Ni3Si/NiTi/Ni3Ti/Ni. The joints' strength is affected by bonding parameters, which include bonding time、bonding temperature、bonding presssure、thickness of Ti or Ni. The shear strength of joints at room temperature and 800℃ could reaches 142MPa and 61MPa, respectively.
What problem does this paper attempt to address?