Diffractive Optical Element Used for Nd : Yag Laser Beam Smoothing
QF Tan,J Yuan,YB Yan,GF Jin,DY Xu
DOI: https://doi.org/10.1117/12.446749
2001-01-01
Abstract:Diffractive optical element(DOE) can be used for beam smoothing, owing to its high light efficiency, design flexibility and so on. The phase design of the DOE can be considered as an optimization problem and optimized by many kinds of algorithms. In this paper, the hybrid algorithm, merging Hill-climbing with Simulated Annealing, is adopted to design the phase of the DOE. The designed phase is the sum of many kinds of sine function with different period, amplitude and initial phase, which the continuous phase DOE is ensured. The continuous phase DOE is fabricated by ion etching, with a rotating hollowed-out mask. Experiments of beam smoothing are carried out with a pulse working Nd:YAG laser, and spots with a rather good beam smoothing performance are obtained.