Abstract:Phase Resolved Optical Emission Spectroscopy (PROES) measurements combined with 1d3v Particle-in-Cell/Monte Carlo Collision (PIC/MCC) simulations are performed to investigate the excitation dynamics in low-pressure capacitively coupled plasmas (CCPs) in argon-oxygen mixtures. The system used for this study is a geometrically symmetric CCP reactor operated in a fixed mixture gas composition, at fixed pressure and voltage amplitude, with a wide range of driving RF frequencies (2$~$MHz$~\le f \le~15~$MHz). The measured and calculated spatio-temporal distributions of the electron impact excitation rates from the Ar ground state to the Ar$~\rm{2p_1}$ state (with a wavelength of 750.4~nm) show good qualitative agreement. The distributions show significant frequency dependence, which is generally considered to be predictive of transitions in the dominant discharge operating mode. Three frequency ranges can be distinguished, showing distinctly different excitation characteristics: (i) in the low frequency range ($f \le~3~$MHz), excitation is strong at the sheaths and weak in the bulk region; (ii) at intermediate frequencies (3.5$~$MHz$~\le f \le~5~$MHz), the excitation rate in the bulk region is enhanced and shows striation formation; (iii) above 6$~$MHz, excitation in the bulk gradually decreases with increasing frequency. Boltzmann term analysis was performed to quantify the frequency dependent contributions of the Ohmic and ambipolar terms to the electron power absorption.

Experimental Observation of the Optical Resonator Effect around 260 nm Central Spectral Region in the Third Continuum of Argon

Resonator Effects of the Third Continuum of Argon at 240 Nm

Resonator Effects of Ar2+ Ionic Excimer Pumped by Electron Beam

Time-resolved spectra of 240 nm at argon third continuum and kinetics analysis

Study on the Optimum Conditions of the Third Continuum of Argon Pumped by Electron Beam

Laser Oscillation from Argon Ionic Excimer

Observation of a Transition in the Dynamics of Strong-Field Atomic Excitation

Radiative Deflection of a BaF Molecular Beam Via Optical Cycling

Measurement and Calculation of the Small Signal Gain Coefficients of the Third Continuum of Argon

Modulation of the Optical Beam with Orbital Angular Momentum in Hot Atomic Rubidium Vapor

Rydberg-state Excitation and Ionization of Argon Atoms Subject to Elliptically Polarized Strong Laser Fields

The effect of rotational Raman response on ultra-flat supercontinuum generation in gas-filled hollow-core photonic crystal fibers

Observation of Optical Transition Radiation from Electron Beams Generated by Laser Plasma Accelerator

Relativistic non-dipole effects in strong-field atomic ionization at moderate intensities

Non-perturbative Effects in Attosecond Four-Wave Mixing Spectra

Frequency-dependent electron power absorption mode transitions in capacitively coupled argon-oxygen plasmas

Observation of photoacoustic Smith-Purcell radiation

Observation of Coherent Smith-Purcell and Transition Radiation Driven by Single Bunch and Micro-Bunched Electron Beams

Generalized Oscillator Strengths of the Valence-Shell Excitations of Argon Studied by Fast Electron Impact

Optically Forbidden Excitations of 3s Electron of Argon by Fast Electron Impact

Time-resolved Measurements of Sub-Optical-cycle Relativistic Electron Beams