Synthesis And Applications Of Tetrapolyfluoroaryl Ethers Of Pentaerythritol In Lowering Interlayer Dielectric Constants

Zhengrong Zhou,ZongBiao Biao Ding,Quanrui Wang,Feng Li,Fenggang Tao,Wei Xu,Yi Xia,Zhuangjian Zhang,Zhongyi Hua
DOI: https://doi.org/10.3321/j.issn:0253-2786.2000.05.029
2000-01-01
Chinese Journal of Organic Chemistry
Abstract:Six tetrapolyfluoroaryl ethers and thioether of pentaerythritol have been synthesized by reaction of phenylsulfonate ester of pentaerythritol with the corresponding phenols or thiophenol. Some products have been found to be amenable to lower greatly the value of dielectric constant K to below 3 when doped to SiO2 films.
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