Preparation Of Pd-Y Alloy Membranes On Porous Alumina By Mocvd Using Mixed Metal Beta-Diketone As Precursors

Cr Xia,Xx Guo,Xj Wang,Cs Chen,Dk Peng,Gy Meng
DOI: https://doi.org/10.3321/j.issn:0251-0790.2000.01.004
2000-01-01
Abstract:A metal-organic chemical vapor deposition (MOCVD) process with metal beta-diketone as precursor was applied to preparing Pd and Pd-Y alloy composite membranes on porous alumina substrates. A palladium phase membrane consisting of primary crystallites with dimension of around 30 nm X 10 nm was deposited when a single Pd(AcAc)(2) precursor was used. With a mixed precursor of 8Pd(AcAc)(2) + Y(AcAc)(3), uniform and dense Pd-Y alloy membranes were reproducibly formed. The alloy membranes consisted of primary crystallites with a dimension of 21 nm X 10 nm,which is much smaller than that of pure Pd membranes. XPS studies revealed that the content of Y in the Pd-Y alloy membranes was less than that in the mixed precursor. This goes along with the results of thermal gravimetric analysis of metal beta-diketones, which showed that the volatility of Y(AcAc)(3) was lower than that of Pd(AcAc)(2). Hydrogen testing showes that the flux of a Pd-Y alloy membrane is much higher than that of a Pd membrane at the temperature investigated. And Pd-Y alloy membranes were more stable than Pd membranes.
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