Liquid density sensor employing the effect of the reflection of bulk acoustic waves

Mingxi Deng,XiaFu Lü,Hongyu Shu,Shaoxi Cai

1998-01-01

Abstract:A new liquid density sensor was studied, and its structure is piezoelectric substrate-liquid layer-isotropic plate. Two interdigital transducers (IDTs) are positioned on the surface of special oriented piezoelectric substrate deviating from liquid layer. The bulk acoustic waves (BAWs) generated by the input IDT will reflected back and forth in the layered structure of the sensor. By selecting proper IDT excitation frequency the most intensive response of BAWs may be obtained in the output IDT. The phase or group delay time of output IDT will alter along with the change of density of the liquid to be measured. In the process of actual experiment the sensor was used to determine the relative change of the density of the liquid (distilled water). The result shows that the resolution of the sensor is 10-6.