Abstract:This paper presents a novel on-chip passive bandpass fllter for millimeter-wave (MMW) applications that utilizes a pair of electrically-coupled thru-silicon vias (TSV). The presented TSV bandpass fllter can be used in MMW applications such as radar, medical imaging, and communication. The TSV bandpass fllter uses two TSVs to extend two electrically-coupled conductors into the silicon substrate in the z-direction instead of horizontally in the x-y plane. There is a metal layer on the bottom side of the silicon substrate that shorts the ends of the two TSVs to ground. Using TSVs in the bandpass fllter design reduces the silicon area required to implement the fllter compared to the silicon area required for the equivalent conventional fllter in the above-silicon metal-dielectric interconnect stack. The operating performance of the bandpass fllter is controlled at the design stage by choosing the separation distance between the TSVs. In this work, the two TSVs were 145"m in height (z-direction) and 3"m £ 50"m in the x-y plane. The long edges of the TSVs (50"m long edges) faced each other to maximize capacitance coupling between the TSV pair. The TSVs were separated by a distance of 5"m. Full-wave electromagnetic simulations of a TSV fllter designed in an IBM SiGe technology that included TSVs show a minimum pass-band insertion loss of i3:9dB at 77GHz with a usable pass band from 75{85GHz is possible. The simulated operating range of the TSV bandpass fllter design presented in this paper show that it is well suited for automotive radar applications.

Monolithic lowpass wave digital filter

Selectable-FSR 10-Ghz Granularity WDM Superchannel Filter in a Reconfigurable Photonic Integrated Circuit

A Novel Ltcc Multilayer Siw Linear Phase Filter

3D Heterogenous Integrated Wideband Switchable Bandpass Filter Bank for Millimeter Wave Applications

A Novel Surface-Mounted Monoblock Dielectric Filter

A CMOS 1.3-1.7GHz Q-Enhanced LC Band-pass RF Filter with 1.5-67% Tunable Fractional Bandwidth

Design of a Miniaturized Dual-Band Double-Folded Substrate Integrated Waveguide Bandpass Filter with Controllable Bandwidths

Design of a low-pass digital filter for 18-bit ΣΔA/D converter

A Novel Compact Thru-Silicon-Via On-Chip Passive Mmw Bandpass Filter for 77ghz Applications

MINIATURIZED MULTILAYER DUAL-MODE SUBSTRATE INTEGRATED WAVEGUIDE FILTER WITH MULTIPLE TRANSMISSION ZEROS

A Low-Loss Slow Wave SIW Bandpass Filter with Blind Via-Holes Using TGV Technology

General lattice wave digital filter with phase compensation scheme

Miniaturized millimeter-wave dual-band band-pass on-chip filter in 0.13-μm SiGe BiCMOS

On-Chip CPW Low-Pass Filter with 50–110 GHz Bandstop in 400 Nm Metal Thickness Technology Towards Lab-Level Ka-Band MMICs

A High-Selectivity Multistage Combline Filter with Wide Stop-Band

Compact Multiplayer Filter with T-Septum Substrate Integrated Waveguide

Compact Second-Order LTCC Substrate Integrated Waveguide Filter with Two Transmission Zeros

Ltcc Compact Filter Based On Multilayered Left-Handed Transmission Line

A High-Speed CSD Coefficient Filter Structure and VLSI Implementation

Modified FSIW Filter with $N$ Transmission Zeros Using BCB-Based MEMS Technology

Millimetre‐wave on‐chip SIW filtering crossover using 0.25 μm GaAs pHEMT technology