Accuracy control of three dimensional laser shaping by ablation

Lijun Li,Jingsong Liu,Lei Hong,Xiangzhong Jin
1998-01-01
Abstract:An on-line workpiece position measuring device and a closed loop control system were developed for accuracy control of three dimensional laser shaping by ablation. The small continuous wave output of an acoustic-optical Q-switched YAG laser is used as the measuring light source of the device. A laser triangulation device is chosen to detect the deviation of the workpiece surface from a fixed position. The measured signal is used to control the emission of the Q-switched pulse laser for ablation. In this way, the uncertainty of the ablation position along the optical axis is greatly limited and the accuracy of the process is increased.
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