Acoustic micro imaging

Yafei Wang,Jinhong Yuan

1996-01-01

Abstract:The working principle, structure and characteristics of several kinds of acoustic micro imaging devices (such as the scanning laser acoustic microscope, mechanical scanning acoustic microscope, and C-mode scanning acoustic microscope) were introduced with their applications in the electronic industry discussed.

What problem does this paper attempt to address?

Escalated Deep-Subwavelength Acoustic Imaging with Field Enhancement Inside a Metalens

Jian Chen,Zeqing Sun,Jing Rao,Danylo Lisevych,Zheng Fan

DOI: https://doi.org/10.1103/physrevapplied.16.044021

IF: 4.6

2021-01-01

Physical Review Applied

Abstract:Super-resolution acoustic imaging with state-of-the-art spatial resolution (lambda/50), with lambda being the wavelength, is showcased with a holey-structured metalens. However, the imaging mechanism under unity transmission based on Fabry-Perot resonances means the metalens fundamentally suffers from narrow bandwidth and limited deep-subwavelength contrast, and therefore further advancement of deepsubwavelength imaging has been stalled. Here we break the barriers for deep-subwavelength acoustic imaging comprehensively in spatial resolution, resolving contrast, and working bandwidth, by exploiting field enhancement inside the metalens. A microscopic model is established to theoretically reveal the underlying physics for escalated deep-subwavelength acoustic imaging. For a proof-of-concept, the imaging performance of the proposed method is numerically proven and experimentally demonstrated. Specifically, a breakthrough resolution below lambda/100 is achieved while resolving contrast is improved by at least 6.5 times and working bandwidth is broadened to approximately 25% of the operating frequency. Furthermore, pulsed acoustic imaging on the deep-subwavelength scale is showcased, which is an important step towards the practical application of the ultrahigh-resolution acoustic imaging technique. We believe the work presented here may greatly benefit a variety of fields in acoustics, such as visualizing subcutaneous structures in medical diagnosis and characterizing subsurface flaws in industrial nondestructive evaluation.
Scanning acoustic microscopy for mapping the microstructure of soft materials

N. G. Parker,M. J. W. Povey,M. J.W. Povey

DOI: https://doi.org/10.48550/arXiv.0904.4832

2009-04-30

Soft Condensed Matter

Abstract:Acoustics provides a powerful modality with which to 'see' the mechanical properties of a wide range of elastic materials. It is particularly adept at probing soft materials where excellent contrast and propagation distance can be achieved. We have constructed a scanning acoustic microscope capable of mapping the microstructure of such materials. We review the general principles of scanning acoustic microscopy and present new examples of its application in imaging biological matter, industrial materials and particulate systems.
300MHZ Scanning Laser Acoustic Microscope

Yafei Wang

1993-01-01

Abstract:The knife-edge and harmonic technique in the Scanning Laser Acoustic Microscope is studied in this paper. The operating frequency of the SLAM can be increased from 100MHz to 300MHz by using the harmonic technique. The acoustic images of some samples are obtained on our SLAM at 300MHz.
The Acoustic Micro Integrated Detection Technique for Silicon Wafer Processing

Sun An-yu,Ju Bing-feng

DOI: https://doi.org/10.4028/www.scientific.net/amr.497.151

2012-01-01

Advanced Materials Research

Abstract:This document presents an integrated detection method for the whole cycle of silicon wafer processing based on Scanning Acoustic Microscope (SAM). It can be used for thickness and chamfering measurement, surface and subsurface testing, internal defects detection and identification. A SAM system was designed for silicon processing and silicon-based devices fabrication. It has more favorable measuring accuracy and quantitative analysis ability than the traditional inspection equipments using for wafer process such as infrared detector.
Acoustic microscopy: resolution of subcellular detail

R N Johnston,A Atalar,J Heiserman,V Jipson,C F Quate

DOI: https://doi.org/10.1073/pnas.76.7.3325

Abstract:Recent advances now permit the use of scanning acoustic microscopy for the analysis of subcellular components. By sequential viewing of identified fixed cells with acoustic, light, and electron microscopy, we have established that the acoustic microscope can readily detect such features as nuclei and nucleoli, mitochondria, and actin cables. Under optimal conditions, images can even be obtained of filopodia, slender projections of the cell surface that are approximately 0.1-0.2 micron in diameter. Small objects separated by as little as 0.5-0.7 micron can successfully be resolved. Three aspects of the acoustic micrographs prepared in this preliminary survey seem especially prominent. These are, first, the extraordinary level of acoustic contrast that can differentiate the various cytoplasmic organelles, even in regions of very thin cytoplasm; second, the reversals in acoustic contrast that occur when altering the plane of focus; and third, the sensitivity of the acoustic response to overall cytoplasmic thickness. The acoustic microscope uses a novel source of contrast that is based on local mechanical properties. In addition, it can provide a degree of resolution that is comparable to that of the light microscope.
Photoacoustic Imaging by Use of Micro-Electro-Mechanical System Scanner

Sung-Liang Chen

DOI: https://doi.org/10.1007/s12204-018-1902-4

2018-01-01

Abstract:Photoacoustic imaging acquires the absorption contrast of biological tissue with ultrasound resolution. It has been broadly investigated in biomedicine for animal and clinical studies. Recently, a micro-electro-mechanical system (MEMS) scanner has been utilized in photoacoustic imaging systems to enhance their performance and extend the realm of applications. The review provides a recap of recent developments in photoacoustic imaging using MEMS scanner, from instrumentation to applications. The topics include the design of MEMS scanner, its use in photoacoustic microscopy, miniature imaging probes, development of dual-modality systems, as well as cutting-edge bio-imaging studies.
Fast Scanning Mode and Its Realization in a Scanning Acoustic Microscope

Bing-Feng Ju,Xiaolong Bai,Jian Chen

DOI: https://doi.org/10.1063/1.3697863

2012-01-01

Abstract:The scanning speed of the two-dimensional stage dominates the efficiency of mechanical scanning measurement systems. This paper focused on a detailed scanning time analysis of conventional raster and spiral scan modes and then proposed two fast alternative scanning modes. Performed on a self-developed scanning acoustic microscope (SAM), the measured images obtained by using the conventional scan mode and fast scan modes are compared. The total scanning time is reduced by 29% of the two proposed fast scan modes. It will offer a better solution for high speed scanning without sacrificing the system stability, and will not introduce additional difficulties to the configuration of scanning measurement systems. They can be easily applied to the mechanical scanning measuring systems with different driving actuators such as piezoelectric, linear motor, dc motor, and so on. The proposed fast raster and square spiral scan modes are realized in SAM, but not specially designed for it. Therefore, they have universal adaptability and can be applied to other scanning measurement systems with two-dimensional mechanical scanning stages, such as atomic force microscope or scanning tunneling microscope.
Acoustic Subwavelength Imaging Of Subsurface Objects With Acoustic Resonant Metalens

ying cheng,chen zhou,qi wei,dajian wu,xiaojun liu

DOI: https://doi.org/10.1063/1.4837875

IF: 4

2013-01-01

Applied Physics Letters

Abstract:Early research into acoustic metamaterials has shown the possibility of achieving subwavelength near-field acoustic imaging. However, a major restriction of acoustic metamaterials is that the imaging objects must be placed in close vicinity of the devices. Here, we present an approach for acoustic imaging of subsurface objects far below the diffraction limit. An acoustic metalens made of holey-structured metamaterials is used to magnify evanescent waves, which can rebuild an image at the central plane. Without changing the physical structure of the metalens, our proposed approach can image objects located at certain distances from the input surface, which provides subsurface signatures of the objects with subwavelength spatial resolution. (C) 2013 AIP Publishing LLC.
Research and development of a scanning laser acoustic microscope operating at 76MHz

Yafei Wang,JingHong Yuan,Ruizheng Cheng,Huaide Mo

1997-01-01

Abstract:The research and development of a scanning laser acoustic microscope (SLAM) operating at 76 MHz is reported. The basic structure of the microscope is introduced. The experimental results show that the resolution of the microscope is 30 ��m, penetration depth reaches 2mm, scanning area reaches 3mm ��4mm. The said microscope has been used for nondestructive inspection of multilayer ceramic capacitors. The acoustic images of some samples are given.
Angular Measurement of Acoustic Reflection Coefficients by the Inversion of V(z, T) Data with High Frequency Time-Resolved Acoustic Microscopy

Jian Chen,Xiaolong Bai,Keji Yang,Bing-Feng Ju

DOI: https://doi.org/10.1063/1.3677327

2012-01-01

Abstract:For inspection of mechanical properties and integrity of critical components such as integrated circuits or composite materials by acoustic methodology, it is imperative to evaluate their acoustic reflection coefficients, which are in close correlation with the elastic properties, thickness, density, and attenuation and interface adhesion of these layered structures. An experimental method based on angular spectrum to evaluate the acoustic coefficient as a function of the incident angle, θ, and frequency, ω, is presented with high frequency time-resolved acoustic microscopy. In order to achieve a high spatial resolution for evaluation of thin plates with thicknesses about one or two wavelengths, a point focusing transducer with a nominal center frequency of 25 MHz is adopted. By measuring the V(z, t) data in pulse mode, the reflection coefficient, R(θ, ω), can be reconstructed from its two-dimensional spectrum. It brings simplicity to experimental setup and measurement procedure since only single translation of the transducer in the vertical direction is competent for incident angle and frequency acquisition. It overcomes the disadvantages of the conventional methods requiring the spectroscopy for frequency scanning and/or ultrasonic goniometer for angular scanning. Two substrates of aluminum and Plexiglas and four stainless plates with various thicknesses of 100 μm, 150 μm, 200 μm, and 250 μm were applied. The acoustic reflection coefficients are consistent with the corresponding theoretical calculations. It opened the way of non-destructive methodology to evaluate the elastic and geometrical properties of very thin multi-layers structures simultaneously.
Acoustic focusing and imaging via phononic crystal and acoustic metamaterials

Fuyin Ma,Zhen Huang,Chongrui Liu,Jiu Hui Wu

DOI: https://doi.org/10.1063/5.0074503

IF: 2.877

2022-01-07

Journal of Applied Physics

Abstract:The effective operation of certain electronic, medical, industrial, and testing equipment relies on high-quality focusing and imaging capability, which also plays a vital role in the field of wave physics. Therefore, continuously improving the resolution capacity is essential. However, in a homogeneous medium dominated by the diffraction limit, the best resolution for wave focusing and imaging could only reach half the wavelength corresponding to the lowest operating frequency, significantly hindering the relevant application value. The development of phononic crystals (PCs) and acoustic metamaterials (AMMs) has realized sub-wavelength focusing and super-resolution imaging and attracted increasing research attention in physics, mechanics, engineering, and biomedical science. This Tutorial explained the basic principles and traditional methods of acoustic focusing and imaging. Then, the implementation principles and related research progress of sub-wavelength focusing and super-resolution imaging based on artificial acoustic devices, including but not limited to PCs and AMMs, were systematically discussed. Moreover, a method was introduced to realize sub-wavelength or sub-diffraction focusing by integrating these artificial devices into the time-reversal procedure. Finally, the potential development trends and practical application prospects were presented.

physics, applied
Acoustic microscopy system: design and preliminary results

J B Liu,J N Peterson,F Forsberg,M D Jaeger,D B Kynor,R J Kline-Schoder

DOI: https://doi.org/10.1016/j.ultras.2003.12.028

IF: 4.2

Ultrasonics

Abstract:An acoustic microscopy system was designed to perform 2D imaging in the C-plane with a single-element transducer. The ultrasound transducer was fabricated by polishing bulk lithium niobate (LiNbO(3)) to the required thickness (approximately 60 or 45 micro) for the desired operating frequency (55 or 75 MHz). The polished LiNbO(3) was attached to acoustic backing and matching layers. Finally, an epoxy lens was applied and the transducer mounted in a housing. The transducer was mounted in a 3D motorized positioning stage and operated by a high-frequency pulser/receiver. Received echoes were sampled with a 2 GHz ADC card and displayed on a PC using software developed in the Matlab environment. Transducer frequency and bandwidth were measured off a steel plate positioned at the focal length. A penny was scanned initially to confirm expected performance before acquiring data from liver (n=3) and spleen (n=3) specimens. For the first probe, the peak frequency was 54.05 MHz with a -6 dB bandwidth of 6.76 MHz. The axial and lateral resolutions were estimated to be 114 and 188 microm, respectively. For the second probe, the peak frequency was measured to 82 MHz with a -6 dB bandwidth of approximately 23 MHz. The axial and lateral resolutions were estimated to be around 33 and 81 microm, respectively. C-scans of the penny clearly showed detailed structures on front and back, while the capsule and the trabecular structures of the splenic tissues could easily be separated in different layers. In conclusion, an acoustic microscopy system operating at 55-75 MHz has been constructed and the feasibility of obtaining high-resolution images of tissue specimens demonstrated.
Application and Theory of Electron Beam Acoustic Microscope (EAM)

M. Murayama,K. Morizuka,T. Ikoma

DOI: https://doi.org/10.7567/JJAPS.23S1.194

Abstract:An electron-beam acoustic microscope (EAM) was developed for application to diagnostics of semiconductor devices and large-scale integrated circuits. A simple theory for the acoustic signal intensity was presented and its validity was verified by comparing the result with experimental ones. Some examples of EAM images were also shown.

Chemistry,Physics,Engineering
Photoacoustic Microscopy Imaging for Advanced Biomedical Applications(Invited)

Ma Haigang,Wu Jiahui,Zhu Yahui,Wei Xiang,Yu Yinshi,Ren Shili,Chen Qian,Zuo Chao

DOI: https://doi.org/10.3788/lop232447

2024-01-01

Laser & Optoelectronics Progress

Abstract:Photoacoustic microscopy(PAM)is a noninvasive imaging technique that has undergone remarkable advancements and applications in the field of life sciences,basic medical research,and medical diagnostics.It operates on the unique principles of detecting photoacoustic signals and reconstructing them to create high-resolution,in-depth structural and functional images.This paper offers a comprehensive overview of the developmental background and unique principles behind photoacoustic microscopy.As we delve deeper,we explored various methods that have been employed to boost imaging performance.These include,but are not limited to,optical enhancement,acoustic enhancement,exploitation of artificial intelligence to augment the entire process.Moreover,there has been a significant focus on the harmonious integration of optics and acoustics in PAM.Ultimately,we discussed the extensive applications of current PAM in modern biomedical research and provided insights into the future developmental trends of this technique.
Acoustic nonlinear imaging and its application in tissue charac terization

Dong Zhang,Xiu-fen Gong

DOI: https://doi.org/10.1142/9789812770943_0006

2007-01-01

Abstract:Acoustic nonlinear imaging has brought about significant impr ovements in image quality by taking advantage of the nonlinear components. This paper reviews works on acoustic nonlinear imaging for biological tissues in our Laboratory, including acoustic nonlinearity parameter B/A imaging, tissue harmonic imaging by using the multi-phase-coded-pulse technique and super harmonic imaging. Theoretical analysis an d experimental imaging of biological tissues by using these methods are presented.
Miniaturized Optical Resolution Photoacoustic Microscope Based on a Microelectromechanical Systems Scanning Mirror

Weizhi Qi,Qian Chen,Heng Guo,Huikai Xie,Lei Xi

DOI: https://doi.org/10.3390/mi9060288

IF: 3.4

2018-01-01

Micromachines

Abstract:In this paper, we report a miniaturized optical resolution photoacoustic microscopy system based on a microelectromechanical system (MEMS) scanning mirror. A two-dimensional MEMS scanning mirror was used to achieve raster scanning of the excitation optical focus. The wideband photoacoustic signals were detected by a flat ultrasound transducer with a center frequency of 10 MHz and an active area of 2 mm in diameter. The size and weight of this device were 60 mm × 30 mm × 20 mm and 40 g, respectively. We evaluated this system using sharp blades, carbon fibers, and a silver strip target. In vivo experiments of imaging vasculatures in the mouse ear, brain, and human lip were completed to demonstrate its potential for biological and clinical applications.
Photoacoustic Laminated Characterization of Dynamic Integrated-Circuits

JW FANG,SY ZHANG,JC CHENG

DOI: https://doi.org/10.1051/jp4:1994748

1994-01-01

Abstract:The layered photoacoustic imaging of dynamic integrated circuits(IC) devices is studied experimentally and theoretically. The experimental method can be used not only to investigate the surface and subsurface structures, but also to analyze the operation modes of the electronic components and the operation principles of IC devices.
Research on scanning tomographic acoustic microscope

Lifeng Yang,Yafei Wang,Ying Zhou,Chunming Gao,Zhanping Wang

DOI: https://doi.org/10.3321/j.issn:0254-3087.2007.09.013

2007-01-01

Abstract:In order to obtain unambiguous 3D images of individual depth planes (tomograms) within a specimen, based on the scanning laser acoustic microscope (SLAM) that was developed by UESTC, we improved the corresponding hardware in the measurement circuit, data acquisition of SLAM, and etc; and introduced nonlinear inverse tomographic algorithm into the improved SLAM. A scanning tomographic acoustic microscope (STAM) prototype was developed. The superior resolution 3D tomography of IC sample was obtained by the STAM experimentally.
Miniaturized all-optical photoacoustic microscopy based on microelectromechanical systems mirror scanning.

Sung-Liang Chen,Zhixing Xie,Tao Ling,L Jay Guo,Xunbin Wei,Xueding Wang

DOI: https://doi.org/10.1364/OL.37.004263

IF: 3.6

2012-01-01

Optics Letters

Abstract:Achieving photoacoustic microscopic imaging through a miniaturized scanning head is a crucial step toward high-resolution photoacoustic endoscopy. In this work, we have developed a miniaturized probe head using a microelectromechanical systems (MEMS) based mirror for raster scan of the laser beam and our newly developed super broad bandwidth microring resonator based ultrasound detector for photoacoustic signal detection. Through this all-optical design, which offers unique advantages for endoscopic applications, this system is capable of three-dimensional (3D) imaging with high resolution of 17.5 mu m in lateral direction and 20 mu m in axial direction at a distance of 3.7 mm. After the performance of this system was validated through the experiments on printed grids and a resolution test target, microscopic imaging of the 3D microvasculatures in canine bladders was also conducted successfully, demonstrating the potential of novel photoacoustic endoscopic in future clinical management of bladder cancer. (C) 2012 Optical Society of America
Noninvasive Subcellular Imaging Using Atomic Force Acoustic Microscopy (Afam)

Xiaoqing Li,Ang Lu,Wenjie Deng,Li Su,Jing Wang,Mingyue Ding

DOI: https://doi.org/10.3390/cells8040314

IF: 6

2019-01-01

Cells

Abstract:We report an imaging approach applying the atomic force acoustic microscopy (AFAM), which has unique potential for nondestructive imaging of cell internal structures. To obtain high spatial resolution images, we optimized the significant imaging parameters, including scanning speeds, feedback configurations and acoustic frequencies of an AFAM system, to increase the amplitude of the acoustic signal and to stabilize the morphological signals. We also combined the acoustic amplitude and phase signals, and generated pseudo-color figures for better illustration of subcellular features such as pseudopodia, membranes and nucleus-like. The subcellular structural image atlas can describe nanoscale details of multiple samples and provide clearer images of the subcellular features compared to other conventional techniques. This study builds a strong basis of transmission AFAM for cell imaging, which can help researchers to clarify the cell structures in diverse biological fields and push the understanding of biology evolution to a new stage.

Acoustic micro imaging

Escalated Deep-Subwavelength Acoustic Imaging with Field Enhancement Inside a Metalens

Scanning acoustic microscopy for mapping the microstructure of soft materials

300MHZ Scanning Laser Acoustic Microscope

The Acoustic Micro Integrated Detection Technique for Silicon Wafer Processing

Acoustic microscopy: resolution of subcellular detail

Photoacoustic Imaging by Use of Micro-Electro-Mechanical System Scanner

Fast Scanning Mode and Its Realization in a Scanning Acoustic Microscope

Acoustic Subwavelength Imaging Of Subsurface Objects With Acoustic Resonant Metalens

Research and development of a scanning laser acoustic microscope operating at 76MHz

Angular Measurement of Acoustic Reflection Coefficients by the Inversion of V(z, T) Data with High Frequency Time-Resolved Acoustic Microscopy

Acoustic focusing and imaging via phononic crystal and acoustic metamaterials

Acoustic microscopy system: design and preliminary results

Application and Theory of Electron Beam Acoustic Microscope (EAM)

Photoacoustic Microscopy Imaging for Advanced Biomedical Applications(Invited)

Acoustic nonlinear imaging and its application in tissue charac terization

Miniaturized Optical Resolution Photoacoustic Microscope Based on a Microelectromechanical Systems Scanning Mirror

Photoacoustic Laminated Characterization of Dynamic Integrated-Circuits

Research on scanning tomographic acoustic microscope

Miniaturized all-optical photoacoustic microscopy based on microelectromechanical systems mirror scanning.

Noninvasive Subcellular Imaging Using Atomic Force Acoustic Microscopy (Afam)