Abstract:Digitized evaluation of micro sparse defects on large fine optical surfaces is one of the challenges in the field of optical manufacturing and inspection. The surface defects evaluation system (SDES) for large fine optical surfaces is developed based on our previously reported work. In this paper, the electromagnetic simulation model based on Finite-Difference Time-Domain (FDTD) for vector diffraction theory is firstly established to study the law of microscopic scattering dark-field imaging. Given the aberration in actual optical systems, point spread function (PSF) approximated by a Gaussian function is introduced in the extrapolation from the near field to the far field and the scatter intensity distribution in the image plane is deduced. Analysis shows that both diffraction-broadening imaging and geometrical imaging should be considered in precise size evaluation of defects. Thus, a novel inverse-recognition calibration method is put forward to avoid confusion caused by diffraction-broadening effect. The evaluation method is applied to quantitative evaluation of defects information. The evaluation results of samples of many materials by SDES are compared with those by OLYMPUS microscope to verify the micron-scale resolution and precision. The established system has been applied to inspect defects on large fine optical surfaces and can achieve defects inspection of surfaces as large as 850mm×500mm with the resolution of 0.5µm.

Fresnel diffraction theory for surface photo-displacement in semiconductors

Modeling for Laser-Induced Surface Thermal Lens in Semiconductors

Superresolution Confocal Technology For Displacement Measurements Based On Total Internal Reflection

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Modeling photomolecular effect using generalized boundary conditions for Maxwell equations

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Modeling of Photoinduced Deformation in Silicon Microcantilever

An evaluation strategy of the thermal conductance of semiconductor interfaces using ultraviolet light

Revised Fowler-Dubridge model for photoelectron emission from two-dimensional materials

Use of the Fresnel equations in the theory of angle-resolved photoemission

Nonlinear Photoacoustic Effect of Semiconductors in Dc Electric-Field

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Analysis of diffraction imaging in non-conjugate configurations.