Two-side electron-beam pumping system for KrF excimer laser of hundred-Joule level

WeiYi Ma,YuSheng Shan,Kungon Zhou,Youtian Wang,Dongming Zhang,Fangfang Wu,Zhe Yang,Naiyan Wang
1996-01-01
Abstract:A description was made on the pulsed power system for the Heaven-I hundred-joule-level KrF excimer laser, which includes: the design of the pulse forming line, bifurcated pulse transmission lines, and large-area diodes, with its experimental results presented. The diodes can steadily operate at 650kV, and the behavior of diode impedance was studied at the diode voltage ranging from 400 to 650kV. The experimental results show that the energy transmission efficiency from the Marx generator to the diodes reaches 75%, and the total electron beam energy arrives at about 22kJ for the 1300kV Marx generator voltage. A hundred-joule-level KrF excimer laser is pumped from two sides by the electron beams provided by this pulsed power system.
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