Research on high accuracy dynamic positioning using diode lasers

Jinsong Han,Yang Zhao,Dacheng Li,Mang Cao,Jia Wang
1995-01-01
Abstract:A new kind of zero optical path difference (OPD) point positioning technique using diode lasers was proposed in this paper. With the linear frequency modulation property of a diode laser and the technique of dual-wavelength refinement, the zero OPD point of a interferometer is dynamically searched with a very high accuracy of 0.01 micrometer. Compared to that of the traditional white light positioning, the interferometer of diode laser positioning is simplified, and the searching range of the zero OPD point has been increased greatly.
What problem does this paper attempt to address?