Gas-humidity sensor fabricated with phthalocyanine Langmuir-Blodgett film

Changzhi Gu,Liangyan Sun,Tong Zhang,Tiejin Li,Mitutoshi Hirata
DOI: https://doi.org/10.1016/0040-6090(94)90598-3
IF: 2.1
1994-01-01
Thin Solid Films
Abstract:Langmuir-Blodgett films of a symmetrically substituted copper phthalocyanine were deposited onto planar interdigital gold microelectrode arrays designed specially with a heating resistor. Measurements on this device showed that it could be used as a humidity sensor at room temperature, and as a gas sensor when it was heated by heating the resistor. Either as a humidity or gas sensor, it exhibits high sensitivity, rapid response and good stability. It has excellent selectivity to NH3 as a gas sensor.
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