Effects of continuous annealing on the performance of ZnO based metal-semiconductor-metal ultraviolet photodetectors

Chunguang Tian,Dayong Jiang,Yajun Zhao,Qingfei Liu,Jianhua Hou,Jianxun Zhao,Qingcheng Liang,Shang Gao,Jieming Qin
DOI: https://doi.org/10.1016/j.mseb.2014.01.008
2014-01-01
Abstract:•We focus on the annealing craftsmanship of ZnO based MSM UV photodetectors.•The responsivity was enlarged greatly after the MSM device annealing.•Au atoms play an important role in the Schottky barrier during annealing.
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