Abstract:Many brittle materials, such as single-crystal materials, amorphous materials, and ceramics, are widely used in many industries such as the energy industry, aerospace industry, and biomedical industry. In recent years, there is an increasing demand for high-precision micro-machining of these brittle materials to produce precision functional parts. Traditional ultra-precision micro-machining can lead to workpiece cracking, low machined surface quality, and reduced tool life. To reduce and further solve these problems, a new micro-machining process is needed. As one of the nontraditional machining processes, rotary ultrasonic machining is an effective method to reduce the issues generated by traditional machining processes of brittle materials. Therefore, rotary ultrasonic micro-machining (RUμM) is investigated to conduct the surface micro-machining of brittle materials. Due to the small diameter cutting tool (<500 μm) and high accuracy requirements, the impact of input parameters in the rotary ultrasonic surface micro-machining (RUSμM) process on tool deformation and cutting quality is extremely different from that in rotary ultrasonic surface machining (RUSM) with relatively large diameter cutting tool (∼10 mm). Up till now, there is still no investigation on the effects of ultrasonic vibration (UV) and input variables (such as tool rotation speed and depth of cut) on cutting force and machined surface quality in RUSμM of brittle materials. To fill this knowledge gap, rotary ultrasonic surface micro-machining of the silicon wafer (one of the most versatile brittle materials) was conducted in this study. The effects of ultrasonic vibration, tool rotation speed, and depth of cut on tool trajectory, material removal rate (MRR), cutting force, cutting surface quality, and residual stress were investigated. Results show that the ultrasonic vibration could reduce the cutting force, improve the cutting surface quality, and suppress the residual compressive stress, especially under conditions with high tool rotation speed.

Rotary Ultrasonic Machining of Sapphire: Feasibility Study and Designed Experiments

Reduction of Edge Chipping in Rotary Ultrasonic Machining by Using Step Drill: a Feasibility Study

Investigations on the critical feed rate guaranteeing the effectiveness of rotary ultrasonic machining.

Review on the Development of the Accessory Rotary Ultrasonic Machining Tools

Research Status and Future Prospects of Rotary Ultrasonic Machining of Hard and Brittle Materials

A Feasibility Study on Elliptical Ultrasonic Assisted Grinding of Sapphire Substrate

Experimental Study of Ultrasonic Vibration Assisted Chemical Mechanical Polishing for Sapphire Substrate

A Study on High Resolution Batch-Mode Micro-Utralsonic-Machining with Constant Feed Force of Sapphire for MEMS Application

Feasibility Study of Longitudinal–Torsional-Coupled Rotary Ultrasonic Machining of Brittle Material

Piezoelectric Ultrasonic Local Resonant Ultra-Precision Grinding for Hard–Brittle Materials

Rotary Ultrasonic Machining of Basalt Rock Using Compressed Air As Coolant: A Study on Edge Chipping and Surface Roughness

An Experimental Investigation of Sapphire Grinding by Porous and Vitrified M0.5/1.5 Diamond Grinding Wheel

Damage Formation and Suppression in Rotary Ultrasonic Machining of Hard and Brittle Materials: A Critical Review

Ultrasonic vibration-assisted scratch-induced characteristics of C-plane sapphire with a spherical indenter

A Two-Dimensional Ultrasonically Assisted Grinding Technique for High Efficiency Machining of Sapphire Substrate

An Experimental Study on Rotary Ultrasonic Machining of High Volume Fraction Silicon Carbide-reinforced Aluminum Matrix Composites (Sicp/al)

Experimental and Theoretical Investigation on Critical Cutting Force in Rotary Ultrasonic Drilling of Brittle Materials and Composites

An Experimental Study on Processing Performance of Rotary Ultrasonic Drilling of K9 Glass

Investigation on the Surface Integrity of 40Cr Steel Machined by Rotary Ultrasonic Flank Milling

Longitudinal-torsional compound ultrasonic vibration end grinding sapphire: A study on surface topography and roughness

Theoretical and experimental investigations on rotary ultrasonic surface micro-machining of brittle materials