Fabrication of Si-Nozzles for Parallel Mechano-Electrospinning Direct Writing

Yanqiao Pan,YongAn Huang,Ningbin Bu,Zhouping Yin
DOI: https://doi.org/10.1088/0022-3727/46/25/255301
2013-01-01
Abstract:Nozzles with micro-scale orifices drive high-resolution printing techniques for generating micro-to nano-scale droplets/lines. This paper presents the fabrication and application of Si-nozzles in mechano-electrospinning (MES). The fabrication process mainly consists of photolithography, Au deposition, inductively coupled plasma, and polydimethylsiloxane encapsulation. The 6 wt% polyethylene oxide solution is adopted to study the electrospinning behaviour and the relations between fibre diameter and process parameters in MES. A fibre grid with 250 mu m spacing is able to be direct written, and the diameters are less than 3 mu m. To improve the printing efficiency, positioning accuracy and flexibility, a rotatable multi-nozzle is adopted. The distance between parallel lines reduces sharply from 4.927 to 0.308 mm with the rotating angle increasing from 0 degrees to 87 degrees, and the fibre grids with tunable distance are achieved. This method paves the way for fabrication of addressable Si-nozzle array in parallel MES direct writing.
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