Fabrication of Barrier Anodic Alumina Insulation Membrane by Anodization

洪春燕,叶芸,郭凡,李松,林之晓,蒋亚东,郭太良
DOI: https://doi.org/10.3969/j.issn.1672-7126.2013.01.08
2013-01-01
Abstract:The barrier anodic alumina membranes with good insulation performance were prepared via chemical route by anodization of pure Al coatings, 1 μm thick, deposited by magnetron sputtering on glass substrates. The impacts of the preparation conditions, including the compositions of the electrolytes, and anodization voltage on its property of the membrane were evaluated. Its microstructures were characterized with scanning electron microscopy and energy dispersive spectroscopy. Under the optimized conditions: a solution of 95% glycol, 1.9% ammonium sebacate, and 3.1 boracic acid, the high quality Al2O3 membrane was obtained. The measured results show that the Al2O3 membrane, a few nm in thickness, possesses an excellent insulation, with a breakdown field of 5.25 MV/cm.
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