Silver Surface-Enhanced Raman Scattering Substrates Prepared by a Nanofabrication Process Using Electron Beam Lithography and Magnetron Sputtering

Wenjun Zhang,Pengfei Nan,Bing-Rui Lu,Yifang Chen,Pankaj Vadgama,Xin-Ping Qu
DOI: https://doi.org/10.1109/nano.2013.6720912
2013-01-01
Abstract:The tunable silver nano-pillar arrays were fabricated by using Electron Beam Lithography and direct current magnetron sputtering technique successfully. The as-prepared substrates retain an excellent Raman-enhancement characteristic. The developed process provides a reproducible and reliable method to fabricate the Surface-enhanced Raman Scattering substrate particularly for the high sensitivity biological detections.
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