Electrostatically driven magnetic field micromodulator with continuous modulating angle and large shifting range

Kun Liu,Huaiqiang Yu,Yitong Cao,Zhihong Li
DOI: https://doi.org/10.1049/mnl.2013.0305
2013-01-01
Micro & Nano Letters
Abstract:Presented is a novel magnetic field modulator made up of permanent magnets, and having a torsional electrostatically driven structure, which was fabricated by electrodeposition and released by KOH solution wet etching. The magnetic properties of the electrodeposited CoNiMnP micromagnets and the torsional angle with respect to the driving voltage of the microdevice have been measured, and the modul...
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