Meta-biosensor with High Q-factor Based on Wet Etching for Terahertz Detection
Xueer Chen,Longfang Ye,Daquan Yu
DOI: https://doi.org/10.1109/jsen.2024.3367890
IF: 4.3
2024-01-01
IEEE Sensors Journal
Abstract:Optical biosensors are the devices converting biological signals into light signals, for quantitative and classification detection. In recent years, metasurfaces combined with terahertz time-domain spectroscopy have been applied in various biosensing field like medical sensing, and food monitoring. However, current meta-sensors face the problems of complex structures and insufficient sensitivity, and target molecules categories are limited. Therefore, we proposed a meta-sensor with both reliable fabrication, simple structure and high sensing performance. Here, the metasurface is fabricated on both rigid and flexible film, the effect of substrate on sensing performance is the first time to be discussed experimentally. We established a novel relationship between analyte (cancer cell, doxycycline hydrochloride) to resonance, and the sensing results are comprehensive and well-performed. In experiments, an obvious frequency shift of 110 GHz occurs when DCH concentration increased from 0.1 to 16 mg/ml. And the practical sensitivity reaches up to 166.67 kHz·mm2/cell for the human prostatic cancer cell DU-145, and 116.67 kHz·mm2/cell for human bladder cancer cell 5637, respectively. The proposed meta-sensor, with advantages of no-label, high Q-factor and reliable performance, not only validates the effectiveness of refractive index sensing, but also provides a significant reference for high-performance terahertz sensors in biological sensing applications.
engineering, electrical & electronic,instruments & instrumentation,physics, applied